Deposition and growth - limits for microelectronics, Anaheim, CA, 1987
- Författare
- Conference on Deposition and Growth: Limits for Microelectronics 1987) (Anaheim : American Institute of Physics Gary W. Rubloff
- (Editor: G.W. Rubloff., "A Topical Conference on Deposition on Growth: Limits for Microelectronocs was held ... in Anaheim, California on November 3-5, 1987")
- Genre
- Konferenser, Ej skönlitteratur, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| American Institute of Physics | 1988 | USA, New York | 388 sidor. ill., diagr. |